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Nanopia inc specializes in the consumable parts, upgrades, size conversions, service and complete refurbishment of MCA E-Chuck Heater(150mm, 200mm, 300mm). We refurbish all kind of MCA E-Chuck Heater [PVD ESC] and all Test as good as the original OEM specifications.
   
 

Refurbishing List

 
Image Picture Assy # Description
0010-01456 150mm MCA E-Chuck Heater
0010-13325 150mm MCA E-Chuck Heater
0010-22165 150mm MCA E-Chuck Heater
0020-25478 150mm MCA E-Chuck Heater Shaft#
0040-21696 150mm MCA E-Chuck Heater
0190-00451 150mm MCA E-Chuck Heater Puck PN#
0190-21310 150mm MCA E-Chuck Heater Puck PN#
0190-21443 150mm MCA E-Chuck Heater Puck PN#
Various  
0010-01166 200mmm MCA E-Chuck Heater
0010-01196 200mmm MCA E-Chuck Heater
0010-01286 200mmm MCA E-Chuck Heater
0010-01288 200mmm MCA E-Chuck Heater
0010-01625 200mmm MCA E-Chuck Heater
0010-01925 200mmm MCA E-Chuck Heater
0010-01926 200mmm MCA E-Chuck Heater
0010-03028 200mmm MCA E-Chuck Heater
0010-03030 200mmm MCA E-Chuck Heater
0010-03254 200mmm MCA E-Chuck Heater
0010-03361 200mmm MCA E-Chuck Heater
0010-04450 200mmm MCA E-Chuck Heater
0010-04452 200mmm MCA E-Chuck Heater
0010-06205 200mmm MCA E-Chuck Heater
0010-08750 200mmm MCA E-Chuck Heater
0010-12516 200mmm MCA E-Chuck Heater
0010-13313 200mmm MCA E-Chuck Heater
0010-13314 200mmm MCA E-Chuck Heater
0010-13895 200mmm MCA E-Chuck Heater
0010-15961 200mmm MCA E-Chuck Heater
0010-21836 200mmm MCA E-Chuck Heater
0010-21839 200mmm MCA E-Chuck Heater
0010-21840 200mmm MCA E-Chuck Heater
0010-21946 200mmm MCA E-Chuck Heater
0010-22166 200mmm MCA E-Chuck Heater
0010-22167 200mmm MCA E-Chuck Heater
0010-22180 200mmm MCA E-Chuck Heater
0010-22186 200mmm MCA E-Chuck Heater
0010-22408 200mmm MCA E-Chuck Heater
0010-22411 200mmm MCA E-Chuck Heater
0010-SLTCE 200mmm MCA E-Chuck Heater
0020-23478 200mmm MCA E-Chuck Heater
0020-25478 200mmm MCA E-Chuck Heater Shaft#
0040-05790 200mmm MCA E-Chuck Heater Cover Plate#
0040-13150 200mmm MCA E-Chuck Heater Cover Plate#
0190-00381 200mmm MCA E-Chuck Heater Puck #
0190-00382 200mmm MCA E-Chuck Heater Puck #
0190-13257 200mmm MCA E-Chuck Heater Puck #
0190-21442 200mmm MCA E-Chuck Heater Puck #
0190-21443 200mmm MCA E-Chuck Heater Puck #
0190-21581 200mmm MCA E-Chuck Heater Puck #
0190-21597 200mmm MCA E-Chuck Heater Puck #
0190-21758 200mmm MCA E-Chuck Heater Puck #
0190-21759 200mmm MCA E-Chuck Heater Puck #
0190-21764 200mmm MCA E-Chuck Heater Puck #
0190-22094 200mmm MCA E-Chuck Heater Puck #
Various  
0010-03774 300mmm MCA E-Chuck Heater
0010-07815 300mmm MCA E-Chuck Heater
0010-11343 300mmm MCA E-Chuck Heater
0010-14204 300mmm MCA E-Chuck Heater
0010-16109 300mmm MCA E-Chuck Heater
0010-16858 300mmm MCA E-Chuck Heater
0010-17111 300mmm MCA E-Chuck Heater
0010-22134 300mmm MCA E-Chuck Heater
0010-22183 300mmm MCA E-Chuck Heater
0010-22184 300mmm MCA E-Chuck Heater
0010-22985 300mmm MCA E-Chuck Heater
0010-23066 300mmm MCA E-Chuck Heater
0010-23068 300mmm MCA E-Chuck Heater
0010-23677 300mmm MCA E-Chuck Heater
0010-23803 300mmm MCA E-Chuck Heater
0010-24076 300mmm MCA E-Chuck Heater
0010-24358 300mmm MCA E-Chuck Heater
0010-24456 300mmm MCA E-Chuck Heater
0010-27430 300mmm MCA E-Chuck Heater
0010-27431 300mmm MCA E-Chuck Heater
0020-08825 300mmm MCA E-Chuck Heater
0040-23068 300mmm MCA E-Chuck Heater Cover Plate#
0040-23680 300mmm MCA E-Chuck Heater Cover Plate#
0040-70754 300mmm MCA E-Chuck Heater Cover Plate#
HTB2-009 300mmm MCA E-Chuck Heater
HTB2-035 300mmm MCA E-Chuck Heater
Various  
 
   

 
 

E-mail : nanopia@empas.com, alexdoctor@yahoo.co.kr  /  Skepe Messenger ID : changdongman
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